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Microelectronics, Volume. 51, Issue 2, 251(2021)

Study on Thermal Resistance of 90 nm PDSOI MOSFETs

LI Tongshuai1,2,3, WANG Fang2,3, WANG Kewei1,2,3, BU Jianhui2,3, HAN Zhengsheng1,2,3, and LUO Jiajun2,3
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  • 1[in Chinese]
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    LI Tongshuai, WANG Fang, WANG Kewei, BU Jianhui, HAN Zhengsheng, LUO Jiajun. Study on Thermal Resistance of 90 nm PDSOI MOSFETs[J]. Microelectronics, 2021, 51(2): 251

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    Paper Information

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    Received: May. 25, 2020

    Accepted: --

    Published Online: Mar. 11, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200231

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology