Researching | Response of Optic profiler to Spatial Wavelength of Optical Element Surface

Acta Optica Sinica, Volume. 18, Issue 12, 1721(1998)

Response of Optic profiler to Spatial Wavelength of Optical Element Surface

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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References(3)

[3] [3] Jean M. Bennett. Recent developments in surface roughness characterization. Engng. Opt., 1993, 6(1): 1～9

[4] [4] E. L. Church, P. E. Takacs. Instrumental effects in surface finish measurement. Proc. SPIE, 1988, 1009: 46～55

[5] [5] P. E. Takacs, E. L. Church. A step-height standard for surface profiler calibration. Proc. SPIE, 1993, 1995: 235～244

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[in Chinese], [in Chinese], [in Chinese]. Response of Optic profiler to Spatial Wavelength of Optical Element Surface[J]. Acta Optica Sinica, 1998, 18(12): 1721

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Sep. 10, 1997

Accepted: --

Published Online: Oct. 18, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology