International Journal of Extreme Manufacturing, Volume. 7, Issue 1, 15105(2025)
Towards atomic-scale smooth surface manufacturing of β-Ga2O3 via highly efficient atmospheric plasma etching
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Zhang Yongjie, Xiao Yuxi, Liang Jianwen, Zhang Chun, Deng Hui. Towards atomic-scale smooth surface manufacturing of β-Ga2O3 via highly efficient atmospheric plasma etching[J]. International Journal of Extreme Manufacturing, 2025, 7(1): 15105
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Received: Feb. 28, 2024
Accepted: Apr. 17, 2025
Published Online: Apr. 17, 2025
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