Journal of Inorganic Materials, Volume. 37, Issue 7, 764(2022)

Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating

Weijie CHENG1,2, Minglei WANG1,2, and Guoqiang LIN1,2、*
Author Affiliations
  • 11. Material Science and Engineering School, Dalian University of Technology, Dalian 116024, China
  • 22. Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024, China
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    References(20)

    [5] KIM M W, KIM K H, KANG M C et al. Mechanical properties and cutting performance of Cr-Al-N hybrid coated micro-tool for micro high-speed machining of flexible fine die.[J]. Current Applied Physics(2012).

    [10] JFCA B, WA C, JCC A et al. Structural, mechanical and tribological behavior of TiCN, CrAlN and BCN coatings in lubricated and non-lubricated environments in manufactured devices[J]. Materials Chemistry and Physics(2020).

    [11] MO Y J, WANG M L, CHEN W J. Composition, structure and properties of the Cr1-xAlxN hard films deposited by arc ion plating[J]. Journl of Inorgamic Materials, 675-681(2020).

    [12] ROBERTSON J. Diamond-like amorphous carbon[J]. Materials Science & Engineering R, 129-281(2002).

    [15] LIN G Q, ZHAO Y H, GUO H M et al. Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition[J]. Acta Ophthalmologica, 288-303(2004).

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    Weijie CHENG, Minglei WANG, Guoqiang LIN. Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating[J]. Journal of Inorganic Materials, 2022, 37(7): 764

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    Paper Information

    Category: RESEARCH ARTICLE

    Received: Oct. 8, 2021

    Accepted: --

    Published Online: Jan. 10, 2023

    The Author Email: Guoqiang LIN (gqlin@dlut.edu.cn)

    DOI:10.15541/jim20210616

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