Fig. 1. Experimental platform for solid-state LPP EUV source

Fig. 2. Calibration results of in-band radiation energy meter. (a) Responsivity curve of in-band radiation energy meter and typical EUV spectrum of Sn plasma; (b) calibrated sensitivities of energy meter under different laser peak power densities

Fig. 3. Calibration results of flat-field spectrometer. (a) Reflectance of Au-plated mirror, diffraction efficiency of variable-spacing concave grating, and quantum efficiency curve of X-ray CCD; (b) total efficiency of spectrometer

Fig. 4. Acquisition results of EUV spectra. (a) Normalized EUV spectra of Sn plasma; (b) relative peak intensity of Sn plasma EUV spectrum

Fig. 5. EUV radiation analysis results. (a) SP of Sn plasma; (b) CE of Sn plasma

Fig. 6. Comparison of CEs of 1-μm solid-state laser-produced plasma EUV light source achieved by various international teams and companies^{[5,13-17,27-29]}