Reactive Sputtering TiO<sub>2</sub>Films

Chinese Journal of Lasers, Volume. 23, Issue 11, 991(1996)

Reactive Sputtering TiO₂Films

[in Chinese] and [in Chinese]

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[in Chinese], [in Chinese]. Reactive Sputtering TiO₂Films[J]. Chinese Journal of Lasers, 1996, 23(11): 991

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Received: Sep. 1, 1995

Accepted: --

Published Online: Dec. 4, 2006

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