OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 20, Issue 4, 62(2022)
Three Dimensional Measurement of Multilayer Complex Micro Nano Structures Based on Structural Light Modulation Analysis
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XIE Zhong-ye, SUN Jing-hua, LI Bo-yao, CHEN Xiao-yong, XIAO Han. Three Dimensional Measurement of Multilayer Complex Micro Nano Structures Based on Structural Light Modulation Analysis[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2022, 20(4): 62
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Received: Dec. 29, 2021
Accepted: --
Published Online: Oct. 29, 2022
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