Laser & Optoelectronics Progress, Volume. 50, Issue 11, 110002(2013)
Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure
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Gao Shengmiao, Han Peigao, Yan Kezhu. Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure[J]. Laser & Optoelectronics Progress, 2013, 50(11): 110002
Paper Information
Category: Reviews
Received: Jun. 25, 2013
Accepted: --
Published Online: Dec. 5, 2014
The Author Email: Gao Shengmiao (gsmiao1988@163.com)
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