Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials

Kun Du; Xiaowei Li; Bingdong Yang; Chao Zhang; Bo Xia

doi:10.3788/LOP57.111417

Laser & Optoelectronics Progress, Volume. 57, Issue 11, 111417(2020)

Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials

Kun Du¹, Xiaowei Li^1、*, Bingdong Yang¹, Chao Zhang¹, and Bo Xia²

¹Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

²College of Mechanical and Electrical Engineering, Shihezi University, Shihezi, Xinjiang 832000, China

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Kun Du, Xiaowei Li, Bingdong Yang, Chao Zhang, Bo Xia. Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111417

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Paper Information

Category: Lasers and Laser Optics

Received: Mar. 20, 2020

Accepted: Apr. 27, 2020

Published Online: Jun. 2, 2020

The Author Email: Li Xiaowei (lixiaowei@bit.edu.cn)

DOI:10.3788/LOP57.111417

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology