Optics and Precision Engineering, Volume. 20, Issue 2, 352(2012)
Forecast of structure sidewall profiles for z-cut quartz after anisotropic wet etching
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XIE Li-qiang, XING Jian-chun, WANG Hao-xu, DONG Pei-tao, WU Xue-zhong. Forecast of structure sidewall profiles for z-cut quartz after anisotropic wet etching[J]. Optics and Precision Engineering, 2012, 20(2): 352
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Received: Aug. 29, 2011
Accepted: --
Published Online: Mar. 6, 2012
The Author Email: XIE Li-qiang (nudtxie@yahoo.com.cn)
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