[3] [3] LEE S Y, TUNG H W, CHEN W C, et al. Thermal Actuated Solid Tunable Lens [J]. IEEE Phptpnics Technology Letters(S1041-1135), 2006, 18(21): 2191-2193.

[8] [8] GAO Meijing, JIN Weiqi, CHEN Yinan, et al. Thermal microscope imaging system for semiconductor device and IC invalidation analysis [C]// The International Society for Optics and Photonics, Beijing, China, Sept 9, 2007, 6621: 1-8.

[9] [9] Patrick Vandewalle, Sabine Süsstrunk, Martin Vetterli. A frequency domain approach to registration of aliased images with application to super-resolution [J]. EURASIP Journal on Applied Signal Processing(S1687-0433), 2006, 2006: 1-14.

[10] [10] Altes A, Joachimsthaler I, Zimmermann G, et al. SEM/SThM-hybrid-System: A new tool for advanced thermal analysis of electronic devices [C]// Physical and Failure Analysis of Integrated Circuits, Singapore, Nov 7-11, 2002, 9: 196-200.