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Acta Optica Sinica, Volume. 27, Issue 11, 1997(2007)

Real-Time Surface Profile Measurement Using Sinusoidal Phase-Modulating Interferometry

[in Chinese]1,2、*, [in Chinese]1,2, and [in Chinese]3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese]. Real-Time Surface Profile Measurement Using Sinusoidal Phase-Modulating Interferometry[J]. Acta Optica Sinica, 2007, 27(11): 1997

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 17, 2006

    Accepted: --

    Published Online: Nov. 12, 2007

    The Author Email: (slhgt@siom.ac.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology