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Opto-Electronic Engineering, Volume. 30, Issue 5, 69(2003)

Study on Technologies and Techniques for Processing Super-Smooth Surface of Single-Crystal Silicon

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [3] [3] Leistner A J,Thwaite E G,Frank Lesha,et al.Polishing study using Teflon and pitch laps to produce flat and supersmooth surfaces[J].Appl.Opt,1992,31(10):1472-1482.

    [4] [4] SONG xiaoli,ZHANG jiwu,XIN qiming,et al.Research on super-smooth technology of optical elements[J].SPIE,4231:214-217.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Technologies and Techniques for Processing Super-Smooth Surface of Single-Crystal Silicon[J]. Opto-Electronic Engineering, 2003, 30(5): 69

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    Paper Information

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    Received: Apr. 3, 2003

    Accepted: --

    Published Online: Nov. 14, 2007

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology