Fig. 1. Schematic of grating structure

Fig. 2. Schematic of grating structure excited SPPs

Fig. 3. Schematic of surface combination structure. (a) Three-dimensional structure of silicon grating-metal particles-dielectric layer; (b) numerical simulation structure

Fig. 4. Spectral characteristics without grating

Fig. 5. Spectral characteristics with grating

Fig. 6. Absorption rate of different combined structures with wavelength

Fig. 7. Average absorption rate of different combination structures

Fig. 8. Effect of nanoparticle diameter on absorption rate

Fig. 9. Light intensity distribution of different wavelengths of light in x-z section of combined microstructure. (a) 0.78 μm; (b) 1.00 μm; (c) 1.44 μm; (d) 2.50 μm