Fig. 1. Motion trajectory model of third-order common rotation planetary

Fig. 2. Initial coordinate model

Fig. 3. Position of plane-concex lens in third-order disk

Fig. 4. Rotating taper frame structure

Fig. 5. Meniscus lens dimensions

Fig. 6. Color filling diagram of film thickness distribution contour line

Fig. 7. Reflection curves under different dips when d=570 mm. (a) α=50°; (b) α=60°; (c) α=70°

Fig. 8. Reflection curves under different dips when d=650 mm. (a) α=50°; (b) α=60°; (c) α=70°

Fig. 9. Reflection curves under different dips when d=700 mm. (a) α=50°; (b) α=60°; (c) α=70°

Fig. 10. Reflection curves under different dips when d=740 mm. (a) α=50°; (b) α=60°; (c) α=70°

Fig. 11. Film thickness distribution at center and edge of meniscus lens under different β. (a) β=20°; (b) β=0°

Fig. 12. Distribution of relative film thickness under different revolution radii and dips

Fig. 13. Relative film thickness distribution varying with L and h. (a) Relative film thickness distribution varying with L when h=1050 mm; (b) relative film thickness distribution varying with h when L=560 mm