Chinese Journal of Lasers, Volume. 50, Issue 24, 2402402(2023)

Fabrication of Micro-Helix Structures via Two-Photon Polymerization Based on Dynamic Multi-Focus Holograms

Chen Xie*, Shixian Sun, Erse Jia, and Minglie Hu
Author Affiliations
  • Ultrafast Laser Laboratory, Key Laboratory of Opto-Electronic Information Science and Technology Ministry of Education, College of Precision Instruments and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
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    Figures & Tables(9)
    Schematic of femtosecond laser two-photon polymerization fabrication system
    Generation of the double-focus beam. (a) Flow chart of improved G-S algorithm; (b) simulated double-focus beam; (c) experimental double-focus beam
    Design and SEM results of micro-helices. (a) Model of the double-helix; (b) double-focus holograms dynamically loaded on SLM; (c) right-hand single-helices and double-helices; (d) left-hand octuple-helices; (e) right-hand octuple-helices with ribs
    Voxels under various exposure conditions. (a) Voxel sizes under various exposure powers for 5 ms exposure time; (b) voxel sizes under 0.02 mW and 0.04 mW exposure power for various exposure time; (c) standing quadruple-focus voxel; (d) toppled quadruple-focus voxel
    Optical microscopic images of collapsed microstructures. (a) Detached from the substrate; (b) adhered to the substrate
    SEM images of micro-helices with different characteristics.(a) dz=0.25 μm, exposure time of voxels is 20‒100 ms; (b) dz=0.125 μm, exposure time of voxels is 20 ms; (c) dz=0.5 μm, exposure time of voxels is 60 ms; (d) dz=0.25 μm, exposure time of voxels is 60 ms; (e) dz=0.125 μm, exposure time of voxels is 60 ms
    SEM images of micro-helices with supported ribs. (a) dz=0.5 μm; (b) dz=0.25 μm; (c) dz=0.125 μm
    Analysis of the variations of the helical thread width with axial voxel spacing. (a) Schematic of piled-up voxels; (b) measured and calculated results of helical thread width under various axial voxel spacings
    • Table 1. Processing parameters of SU-8 2002 and SU-8 2035

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      Table 1. Processing parameters of SU-8 2002 and SU-8 2035

      PhotoresistSpin speed /(r·min-1Soft bake time@95 ℃ /minExposure methodPost bake time@95 ℃ /min
      SU-8 200210003UV lamp3
      SU-8 2035200020Femtosecond laser5
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    Chen Xie, Shixian Sun, Erse Jia, Minglie Hu. Fabrication of Micro-Helix Structures via Two-Photon Polymerization Based on Dynamic Multi-Focus Holograms[J]. Chinese Journal of Lasers, 2023, 50(24): 2402402

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Mar. 8, 2023

    Accepted: May. 22, 2023

    Published Online: Dec. 7, 2023

    The Author Email: Xie Chen (xie_chen@tju.edu.cn)

    DOI:10.3788/CJL230772

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