Chinese Journal of Lasers, Volume. 50, Issue 24, 2402402(2023)
Fabrication of Micro-Helix Structures via Two-Photon Polymerization Based on Dynamic Multi-Focus Holograms
Fig. 1. Schematic of femtosecond laser two-photon polymerization fabrication system
Fig. 2. Generation of the double-focus beam. (a) Flow chart of improved G-S algorithm; (b) simulated double-focus beam; (c) experimental double-focus beam
Fig. 3. Design and SEM results of micro-helices. (a) Model of the double-helix; (b) double-focus holograms dynamically loaded on SLM; (c) right-hand single-helices and double-helices; (d) left-hand octuple-helices; (e) right-hand octuple-helices with ribs
Fig. 4. Voxels under various exposure conditions. (a) Voxel sizes under various exposure powers for 5 ms exposure time; (b) voxel sizes under 0.02 mW and 0.04 mW exposure power for various exposure time; (c) standing quadruple-focus voxel; (d) toppled quadruple-focus voxel
Fig. 5. Optical microscopic images of collapsed microstructures. (a) Detached from the substrate; (b) adhered to the substrate
Fig. 6. SEM images of micro-helices with different characteristics.(a) dz=0.25 μm, exposure time of voxels is 20‒100 ms; (b) dz=0.125 μm, exposure time of voxels is 20 ms; (c) dz=0.5 μm, exposure time of voxels is 60 ms; (d) dz=0.25 μm, exposure time of voxels is 60 ms; (e) dz=0.125 μm, exposure time of voxels is 60 ms
Fig. 7. SEM images of micro-helices with supported ribs. (a) dz=0.5 μm; (b) dz=0.25 μm; (c) dz=0.125 μm
Fig. 8. Analysis of the variations of the helical thread width with axial voxel spacing. (a) Schematic of piled-up voxels; (b) measured and calculated results of helical thread width under various axial voxel spacings
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Chen Xie, Shixian Sun, Erse Jia, Minglie Hu. Fabrication of Micro-Helix Structures via Two-Photon Polymerization Based on Dynamic Multi-Focus Holograms[J]. Chinese Journal of Lasers, 2023, 50(24): 2402402
Category: Laser Micro-Nano Manufacturing
Received: Mar. 8, 2023
Accepted: May. 22, 2023
Published Online: Dec. 7, 2023
The Author Email: Xie Chen (xie_chen@tju.edu.cn)