Acta Optica Sinica, Volume. 41, Issue 20, 2011001(2021)
Study on Imaging Characteristics of Multilayer Micropatterns
Article index updated: Sep. 6, 2025
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Zhichang Mo, Jingsong Wei, Qing Cao. Study on Imaging Characteristics of Multilayer Micropatterns[J]. Acta Optica Sinica, 2021, 41(20): 2011001
Category: Imaging Systems
Received: Apr. 13, 2021
Accepted: May. 6, 2021
Published Online: Sep. 30, 2021
The Author Email: Jingsong Wei (weijingsong@siom.ac.cn)