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Acta Optica Sinica, Volume. 41, Issue 20, 2011001(2021)

Study on Imaging Characteristics of Multilayer Micropatterns

Zhichang Mo1,2, Jingsong Wei2、*, and Qing Cao1
Author Affiliations
  • 1College of Sciences, Shanghai University, Shanghai 200444, China
  • 2Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    Article index updated: Sep. 28, 2025

    The article is cited by 2 article(s) CLP online library. (Some content might be in Chinese.)
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    Zhichang Mo, Jingsong Wei, Qing Cao. Study on Imaging Characteristics of Multilayer Micropatterns[J]. Acta Optica Sinica, 2021, 41(20): 2011001

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    Paper Information

    Category: Imaging Systems

    Received: Apr. 13, 2021

    Accepted: May. 6, 2021

    Published Online: Sep. 30, 2021

    The Author Email: Jingsong Wei (weijingsong@siom.ac.cn)

    DOI:10.3788/AOS202141.2011001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology