Opto-Electronic Engineering, Volume. 30, Issue 3, 13(2003)
Fabrication of Continuous Surface Micro-Optical Elements Using Deep Etching Technology
References(1)
[6] [6] ZHOU Changhe, XI Peng, DAI Enwen et. al. Phase gratings made with inductively coupled plasma technology [J]. SPIE, 2001, 4470: 138-145.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Continuous Surface Micro-Optical Elements Using Deep Etching Technology[J]. Opto-Electronic Engineering, 2003, 30(3): 13
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