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Chinese Journal of Lasers, Volume. 11, Issue 9, 552(1984)

Operating characteristics of a repetitive excimer laser without gas cycling system

Yuan Cailai, Le Yaokang, and Jiang Baocai
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    [1] [1] Κ. I. Fujii et al.; IEEE J. Quant. Electr., 1981, QE-17, 1315.

    [2] [2] T. J. МоKee et al.; APL, 1980,36, 943.

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    Yuan Cailai, Le Yaokang, Jiang Baocai. Operating characteristics of a repetitive excimer laser without gas cycling system[J]. Chinese Journal of Lasers, 1984, 11(9): 552

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    Paper Information

    Category: laser devices and laser physics

    Received: Nov. 22, 1982

    Accepted: --

    Published Online: Sep. 4, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology