Fig. 1. Schematic diagram of Wolter focusing mirror

Fig. 2. Intensity distributions at focal planes of Wolter mirrors for different combinations of Lsf and θA. (a) Lsf=9000 mm, θA=120 mrad; (b) Lsf=52000 mm, θA=10 mrad

Fig. 3. Transmission efficiency of Wolter mirror for different combinations of Lsf and θA with source parameters of σX,σZ=28 μm and σX',σZ'=100 μrad. (a) 300 eV; (b) 10 keV

Fig. 4. Transmission efficiency of Wolter mirror for different combinations of Lsf and θA with source parameters of σX,σZ=28 μm and σX',σZ'=1 μrad. (a) 300 eV; (b) 10 keV

Fig. 5. Transmission efficiencies of Wolter mirrors with different coated materials

Fig. 6. Definition of directions of angle and position alignment errors of optical systems

Fig. 7. Horizontal and vertical sizes of the focal spot varying with the rotational errors for Wolter and ellipsoidal mirrors. (a)(b) Pitch; (c)(d) yaw

Fig. 8. Transmission efficiency varying with rotational errors of Wolter and ellipsoidal mirrors. (a) Alignment errors of pitch and yaw angles of Wolter mirrors; (b) alignment errors of pitch and yaw angles of ellipsoidal mirrors

Fig. 9. Effect of translational error on size of focusing spot for Wolter mirror and ellipsoid mirror. (a)(b) X direction; (c)(d) Y direction; (e)(f) Z direction

Fig. 10. Effect of translational error on transmission efficiency for Wolter and ellipsoidal mirrors. (a) Translational errors in X, Y, and Z directions for Wolter mirror; (b) translational errors in X, Y, and Z directions for ellipsoidal mirror