Journal of Infrared and Millimeter Waves, Volume. 25, Issue 1, 46(2006)
DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR LIU Hai-Tao CHEN Yong-Ping LIANG Ping-Zhi
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[in Chinese], [in Chinese], [in Chinese]. DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR LIU Hai-Tao CHEN Yong-Ping LIANG Ping-Zhi[J]. Journal of Infrared and Millimeter Waves, 2006, 25(1): 46