Journal of Infrared and Millimeter Waves, Volume. 25, Issue 1, 46(2006)

DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR LIU Hai-Tao CHEN Yong-Ping LIANG Ping-Zhi

[in Chinese]1,2, [in Chinese]1, and [in Chinese]1
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  • 1[in Chinese]
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    References(5)

    [1] [1] Amantea R,Knoedler C M,Pantuso F P.et al.An uncooled IR imaging with 5mk NEDT[ J].SPIE,1997,3061:210-222.

    [2] [2] Zhao yang,Mingyao mao,Roberto Horowetz.et al.Optomechanical uncooled infrared imaging system:desing,microfabrication,and performance [J].IEEE,2002,11:136-146.

    [3] [3] Amantea R,Goodman L A,Pantuso F.et al.Progress towards an Uncooled IR Imager With 5 mk NEDT[J].SPIE,1998,3436:647-659.

    [6] [6] Gregory T,Kovacs A.Micromachined Transducers Sourcebook.[ M ].Beijing:Science Press,2003:57.

    [7] [7] G.Datskos P,Rsjic S.Fabrication of quantum well microcantilever photon detectors [ J ].Ultramicroscopy,2001,86:191-206.

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    [1] Zhang Xuewu, Ding Yanqiong, Yan Ping. Vision Inspection of Metal Surface Defects Based on Infrared Imaging[J]. Acta Optica Sinica, 2011, 31(3): 312004

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    [in Chinese], [in Chinese], [in Chinese]. DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR LIU Hai-Tao CHEN Yong-Ping LIANG Ping-Zhi[J]. Journal of Infrared and Millimeter Waves, 2006, 25(1): 46

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    Paper Information

    Received: May. 23, 2005

    Accepted: --

    Published Online: Jul. 5, 2006

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