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Opto-Electronic Engineering, Volume. 44, Issue 12, 1244(2017)

Study on etch process of GaSb-based VCSEL

Xin Zhang, Yang Li, Xia Wang, Yang Li, Gangli Yue, Zhiwei Wang, Jianlai Xie, Jiabin Zhang, and Yongqin Hao
Author Affiliations
  • National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130022, China
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    Xin Zhang, Yang Li, Xia Wang, Yang Li, Gangli Yue, Zhiwei Wang, Jianlai Xie, Jiabin Zhang, Yongqin Hao. Study on etch process of GaSb-based VCSEL[J]. Opto-Electronic Engineering, 2017, 44(12): 1244

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    Received: --

    Accepted: --

    Published Online: Jan. 17, 2018

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    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology