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Acta Optica Sinica, Volume. 34, Issue 9, 905003(2014)

Effect of Period Setting Value on Printed Phase in Scanning Beam Interference Lithography System

Jiang Shan1,2、*, Bayanheshig1, Li Wenhao1, Song Ying1,2, and Pan Mingzhong1
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  • 1[in Chinese]
  • 2[in Chinese]
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    CLP Journals

    [1] Wang Wei, Bayanheshig, Song Ying, Jiang Shan, Pan Mingzhong. Beam Alignment and Convergence Analysis of Scanning Beam Interference Lithography Systems[J]. Chinese Journal of Lasers, 2016, 43(12): 1205001

    [2] Qian Guolin, Wu Jianhong, Li Chaoming, Chen Xinrong, Zou Wenlong. Study of Gratings Tiled by Holographic Exposure with Wave Aberration[J]. Acta Optica Sinica, 2015, 35(3): 305002

    [3] Cheng Weilin, Zhu Jing, Zhang Yunbo, Zeng Aijun, Huang Huijie. Status and Development of Scanning Beam Interference Lithography System[J]. Laser & Optoelectronics Progress, 2015, 52(10): 100001

    [4] Wang Wei, Bayanheshig, Pan Mingzhong, Song Ying, Li Wenhao. Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2017, 37(7): 722003

    [5] [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Accurate Method for Measuring Interference Fringe Period in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2015, 35(7): 705001

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    Jiang Shan, Bayanheshig, Li Wenhao, Song Ying, Pan Mingzhong. Effect of Period Setting Value on Printed Phase in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2014, 34(9): 905003

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    Paper Information

    Category: Diffraction and Gratings

    Received: Mar. 17, 2014

    Accepted: --

    Published Online: Aug. 12, 2014

    The Author Email: Shan Jiang (jiangshan0122@126.com)

    DOI:10.3788/aos201434.0905003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology