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Journal of Synthetic Crystals, Volume. 50, Issue 5, 838(2021)

Effects of Different Annealing Conditions on the Characteristics of Ga2O3 Thin Films Prepared by PEALD

MA Haixin1,2、*, DING Guangyu1, XING Yanhui1, HAN Jun1, ZHANG Yao1, CUI Boyao1, LIN Wenkui2, YIN Haotian1, and HUANG Xingjie1
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    MA Haixin, DING Guangyu, XING Yanhui, HAN Jun, ZHANG Yao, CUI Boyao, LIN Wenkui, YIN Haotian, HUANG Xingjie. Effects of Different Annealing Conditions on the Characteristics of Ga2O3 Thin Films Prepared by PEALD[J]. Journal of Synthetic Crystals, 2021, 50(5): 838

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    Paper Information

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    Received: Feb. 5, 2021

    Accepted: --

    Published Online: Aug. 23, 2021

    The Author Email: Haixin MA (1319125102@qq.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology