Fig. 1. Experimental setup of laser-produced plasma extreme ultraviolet light source using structured target

Fig. 2. Extreme ultraviolet radiation spectra and integral intensity of in-band radiation at 13.5 nm (2% bandwidth) when incident laser energy is 500 mJ, width of groove is 300 μm, and groove depths are 0, 50, 100, 150, and 200 μm. (a) Extreme ultraviolet radiation spectra; (b) integral intensity of in-band radiation at 13.5 nm (2% bandwidth) varying with groove depth

Fig. 3. Dependence of enhancement of 13.5 nm (2% bandwidth) in-band radiation intensity on incident laser energy under different groove depth (50,100,150, and 200 μm) and fixed groove width of 300 μm

Fig. 4. Extreme ultraviolet radiation spectra and integral intensity of in-band radiation at 13.5 nm (2% bandwidth) when incident laser energy is 500 mJ, depth of groove target is 100 μm, and groove widths are 100, 200, 300, and 400 μm. (a) Extreme ultraviolet radiation spectra; (b) integral intensity of in-band radiation at 13.5 nm (2% bandwidth) varying with groove width

Fig. 5. Dependence of enhancement of 13.5 nm (2% bandwidth) in-band radiation intensity on incident laser energy under different groove width (100, 200, 300, and 400 μm) and fixed groove depth of 100 μm

Fig. 6. Dependence of enhancement of 13.5 nm(2% bandwidth) in-band radiation integral intensity on focal spot diameter when incident laser energy is 500 mJ, groove depth is 100 μm, and groove width is 300 μm