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Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 63(2025)

Process Study of Wet Etching Sensitive Film for Pressure Sensors

YAN Shijin1, WANG Bingyin2, WANG Zhiqiang2, LEI Cheng1, JI Pengfei1, QIU Haibing1, TAN Qiulin1, and LIANG Ting1
Author Affiliations
  • 1State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
  • 2Inner Mongolia Power Machinery Research Institute, Hohhot 010010, China
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    YAN Shijin, WANG Bingyin, WANG Zhiqiang, LEI Cheng, JI Pengfei, QIU Haibing, TAN Qiulin, LIANG Ting. Process Study of Wet Etching Sensitive Film for Pressure Sensors[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 63

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    Paper Information

    Received: Aug. 26, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.010

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology