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Acta Optica Sinica, Volume. 33, Issue 11, 1111002(2013)

Influence of the Axial Component of Mask Diffraction Spectrum on Lithography Imaging

Dong Lisong*, Li Yanqiu, and Guo Xuejia
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    Article index updated: Mar. 10, 2025

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    Dong Lisong, Li Yanqiu, Guo Xuejia. Influence of the Axial Component of Mask Diffraction Spectrum on Lithography Imaging[J]. Acta Optica Sinica, 2013, 33(11): 1111002

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    Paper Information

    Category: Imaging Systems

    Received: Apr. 1, 2013

    Accepted: --

    Published Online: Oct. 20, 2013

    The Author Email: Lisong Dong (donglisong@bit.edu.cn)

    DOI:10.3788/aos201333.1111002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology