Chinese Journal of Lasers, Volume. 47, Issue 5, 0502009(2020)

Fabrication of Embedded Submicron Metal Lines on Glass Surfaces

Haofeng Yu, Jian Xu*, Aodong Zhang, and Ya Cheng
Author Affiliations
  • State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China
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    Figures & Tables(5)
    Fabrication of embedded submicron metal lines on fused silica surfaces. (a) Three-dimensional schematic of fabrication procedure; (b) cross-sectional schematic of fabrication procedure; (c) a schematic of experimental setup for continuous-flow electroless plating
    Optical micrographs of grooves ablated by laser with different pulse energies and metal lines after mechanical polishing
    Pulse energies versus linewidths of laser-ablated grooves and metal lines after mechanical polishing
    SEM images of silver microstructures deposited by continuous-flow electroless plating before and after thermal treatment. (a)(b) Before thermal treatment; (c)(d) after thermal treatment
    Embedded submicron metal lines with various shapes (linewidths of metal lines are about 0.8 μm). (a) Grid; (b) spiral; (c) square-wave; (d) Chinese character patterns
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    Haofeng Yu, Jian Xu, Aodong Zhang, Ya Cheng. Fabrication of Embedded Submicron Metal Lines on Glass Surfaces[J]. Chinese Journal of Lasers, 2020, 47(5): 0502009

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    Paper Information

    Category: laser manufacturing

    Received: Nov. 27, 2019

    Accepted: Jan. 10, 2020

    Published Online: May. 12, 2020

    The Author Email: Xu Jian (jxu@phy.ecnu.edu.cn)

    DOI:10.3788/CJL202047.0502009

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