Chinese Journal of Lasers, Volume. 47, Issue 5, 0502009(2020)
Fabrication of Embedded Submicron Metal Lines on Glass Surfaces
Fig. 1. Fabrication of embedded submicron metal lines on fused silica surfaces. (a) Three-dimensional schematic of fabrication procedure; (b) cross-sectional schematic of fabrication procedure; (c) a schematic of experimental setup for continuous-flow electroless plating
Fig. 2. Optical micrographs of grooves ablated by laser with different pulse energies and metal lines after mechanical polishing
Fig. 3. Pulse energies versus linewidths of laser-ablated grooves and metal lines after mechanical polishing
Fig. 4. SEM images of silver microstructures deposited by continuous-flow electroless plating before and after thermal treatment. (a)(b) Before thermal treatment; (c)(d) after thermal treatment
Fig. 5. Embedded submicron metal lines with various shapes (linewidths of metal lines are about 0.8 μm). (a) Grid; (b) spiral; (c) square-wave; (d) Chinese character patterns
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Haofeng Yu, Jian Xu, Aodong Zhang, Ya Cheng. Fabrication of Embedded Submicron Metal Lines on Glass Surfaces[J]. Chinese Journal of Lasers, 2020, 47(5): 0502009
Category: laser manufacturing
Received: Nov. 27, 2019
Accepted: Jan. 10, 2020
Published Online: May. 12, 2020
The Author Email: Xu Jian (jxu@phy.ecnu.edu.cn)