Chinese Journal of Lasers, Volume. 47, Issue 5, 0502009(2020)

Fabrication of Embedded Submicron Metal Lines on Glass Surfaces

Haofeng Yu, Jian Xu*, Aodong Zhang, and Ya Cheng
Author Affiliations
  • State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China
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    In this study, a method for fabricating embedded submicron metal wires on glass surfaces is demonstrated. First, grooves with submicron linewidths were ablated on glass surfaces using femtosecond laser direct writing. Then, metal films were deposited on the laser-treated glass surfaces using continuous-flow electroless plating. Subsequently, the plated samples were annealed by a thermal treatment process. Finally, an additional mechanical polishing process enabled the controllable fabrication of the embedded submicron metal wires on the glass surfaces. By combining the threshold effects of femtosecond laser ablation and continuous-flow electroless plating, metallic silver lines with a minimum linewidth of approximately 0.66 μm can be prepared. Moreover, four-probe measurement results indicate that the resistivity of the fabricated submicron metal wires is only approximately 1.2 higher than that of bulk silver, thus indicating their good electrical conductivity.

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    Haofeng Yu, Jian Xu, Aodong Zhang, Ya Cheng. Fabrication of Embedded Submicron Metal Lines on Glass Surfaces[J]. Chinese Journal of Lasers, 2020, 47(5): 0502009

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    Paper Information

    Category: laser manufacturing

    Received: Nov. 27, 2019

    Accepted: Jan. 10, 2020

    Published Online: May. 12, 2020

    The Author Email: Xu Jian (jxu@phy.ecnu.edu.cn)

    DOI:10.3788/CJL202047.0502009

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