OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 20, Issue 2, 159(2022)

Process Study on Chemical Polishing of Quartz Glass Slices

TANG Ying-tong and YANG Chang-cheng
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  • [in Chinese]
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    References(8)

    [2] [2] Chen S T, Jiang Z H. A force controlled grinding-milling technique for quartz-glass micromachining[J]. Journal of Materials Processing Technology, 2015, 216: 206-215.

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    [4] [4] Aalia S B, Ghatakb B, Guptab S D. Detection of 3-Carene in mango using aquartz crystal microbalance sensor[J]. Sensors and Actuators: B, 2016, 230: 791-800.

    [5] [5] Li Y Q, Zheng N. Morphology and distribution of subsurface damage in optical fused silicaarts: Bound-abrasive Grinding[J]. Applied Surface Science, 2011, 257: 2066-2073.

    [6] [6] LiS Y, Wang Z, Wu Y L. Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes[J]. Journal of Material Processing Technology, 2008, 205: 34-41.

    [7] [7] Wang J A. Evaluating subsurface damage in optical glasses[J]. Journal of the European Optical Society, 2011, 6: 11001.

    [8] [8] Fine K R, Garbe R, Gip T, et al. Non-destructive real-time direct measurement of subsurface damage[C]. SPIE, 2005: 105-110.

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    TANG Ying-tong, YANG Chang-cheng. Process Study on Chemical Polishing of Quartz Glass Slices[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2022, 20(2): 159

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    Paper Information

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    Received: Oct. 26, 2021

    Accepted: --

    Published Online: Aug. 2, 2022

    The Author Email:

    DOI:

    CSTR:32186.14.

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