Chinese Journal of Lasers, Volume. 43, Issue 10, 1003002(2016)

Influence of Annealing on Interface Diffusion and Anti-Chemica-Cleaning Property of Metal-Dielectric Multilayer Films

Zhang Hong1,2、*, Jin Yunxia2, Kong Fanyu2, Huang Haopeng1,2, Cui Yun2, Hu Guoxing2, Li Xiangtan2, Ge Wenna3, and Ye Bangjiao3
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    Zhang Hong, Jin Yunxia, Kong Fanyu, Huang Haopeng, Cui Yun, Hu Guoxing, Li Xiangtan, Ge Wenna, Ye Bangjiao. Influence of Annealing on Interface Diffusion and Anti-Chemica-Cleaning Property of Metal-Dielectric Multilayer Films[J]. Chinese Journal of Lasers, 2016, 43(10): 1003002

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    Paper Information

    Category: materials and thin films

    Received: Mar. 31, 2016

    Accepted: --

    Published Online: Oct. 12, 2016

    The Author Email: Hong Zhang (zhangustc@siom.ac.cn)

    DOI:10.3788/cjl201643.1003002

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