Chinese Optics Letters, Volume. 13, Issue 10, 100501(2015)
Symmetrical short-period and high signal-to-noise ratio heterodyne grating interferometer
Figures & Tables(8)
Fig. 1. Schematic of the optical configuration for the proposed HGI, BS: beam splitter.
Fig. 2. Experimental setup of the optical system for the proposed HGI.
Fig. 3. Measurement result of the linear movement with a displacement of 10 mm.
Fig. 4. Measurement result of the sinusoidal movement with an amplitude of 10 μm.
Fig. 5. Measurement result of the round-trip step movement with a total displacement of 10 nm.
Fig. 6. Stability measurement results for the HGI and the XL-80 in ten minutes.
Table 1. Measurement Results and Residual Errors of the HGI and the XL-80 for the 10 mm Displacement
View tableView in ArticleTable 1. Measurement Results and Residual Errors of the HGI and the XL-80 for the 10 mm Displacement
HGI (mm) XL-80 (mm) Ratio Residual Error (nm) 1st 10.000710 9.999553 1.000116 −32.95 2nd 10.000657 9.999463 1.000120 4.07 3rd 10.000142 9.998967 1.000118 −14.88 4th 10.000943 9.999773 1.000117 −19.97 5th 10.000125 9.998907 1.000122 28.13 6th 10.000241 9.999100 1.000114 −48.89 7th 10.000400 9.999201 1.000120 9.10 8th 10.000747 9.999537 1.000121 20.06 9th 10.000079 9.998900 1.000118 −10.87 10th 10.000453 9.999236 1.000122 27.09
Tools
Get Citation
Copy Citation Text
Cunbao Lin, Shuhua Yan, Zhiguang Du, Guochao Wang, Chunhua Wei, "Symmetrical short-period and high signal-to-noise ratio heterodyne grating interferometer," Chin. Opt. Lett. 13, 100501 (2015)
Paper Information
Category: Diffraction and Gratings
Received: Jun. 9, 2015
Accepted: Jul. 23, 2015
Published Online: Sep. 13, 2018
The Author Email: Shuhua Yan (yanshuhua996@163.com)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20