Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

Xiangjun Dai; Tianyu Yuan; Hanyang Jiang; Xinxing Shao; Meiling Dai; Hai Yun; Fujun Yang; Xiaoyuan He

doi:10.3788/COL201816.031201

Chinese Optics Letters, Volume. 16, Issue 3, 031201(2018)

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

Xiangjun Dai^1,2、*, Tianyu Yuan¹, Hanyang Jiang², Xinxing Shao², Meiling Dai², Hai Yun¹, Fujun Yang², and Xiaoyuan He²

Author Affiliations

¹School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China

²Department of Engineering Mechanics, Southeast University, Nanjing 210096, China

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Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He, "Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape," Chin. Opt. Lett. 16, 031201 (2018)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Nov. 22, 2017

Accepted: Jan. 18, 2018

Published Online: Jul. 13, 2018

The Author Email: Xiangjun Dai (daixiangjun@sdut.edu.cn)

DOI:10.3788/COL201816.031201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology