Frontiers of Optoelectronics, Volume. 15, Issue 1, 12200(2022)
Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
In this paper, we report on polarization combining two-dimensional grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk Si wafers. The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of -5 dB with a wafer variation of ± 1.2 dB. Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated.
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Galina Georgieva, Christian Mai, Pascal M. Seiler, Anna Peczek, Lars Zimmermann. Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line[J]. Frontiers of Optoelectronics, 2022, 15(1): 12200
Category: RESEARCH ARTICLE
Received: Jul. 30, 2021
Accepted: Nov. 15, 2021
Published Online: Aug. 25, 2022
The Author Email: Galina Georgieva (galina.georgieva@tu-berlin.de)