[1] [1] FAUDZI A A M, SABZEHMEIDANI Y, SUZUMORI K. Application of micro-electro-mechanical systems (MEMS) as sensors: A review［J］. Journal of Robotics and Mechatronics, 2020, 32(2): 281-288.

[2] [2] PATTANAIK P, OJHA M. Review on challenges in MEMS technology［J］. Materials Today: Proceedings, 2021

[4] [4] LI Y Q, SUN Y F, HU W W, et al. A novel correlative model of failure mechanisms for evaluating MEMS devices reliability［J］. Microelectronics Reliability, 2016, 64: 669-675.

[5] [5] MERLIJN VAN SPENGEN W. MEMS reliability from a failure mechanisms perspective［J］. Microelectronics Reliability, 2003, 43(7): 1049-1060.

[6] [6] SAGHAEIAN F, LEDERER M, HOFER A, et al. Investigation of high cyclic fatigue behaviour of thin copper films using MEMS structure［J］. International Journal of Fatigue, 2019, 128: 105179.

[13] [13] KARTHIK D, SWAROOP S. Laser peening without coating-An advanced surface treatment: A review［J］. Materials and Manufacturing Processes, 2017, 32(14): 1565-1572.

[17] [17] ZHU W, ZHOU J Z, WANG M, et al. Study on the numerical simulation and statistical optimization of micro-scale laser shock peening［J］. Journal of Computational and Theoretical Nanoscience, 2012, 9(9): 1399-1403.

[18] [18] SHIGANOV I, MELNIKOV D, MISYUROV A, et al. Investigation the effect of laserablation parameters in a liquid in order to reduce the pulse energy during laser shock peening［J］. Optical and Quantum Electronics, 2020, 52(4): 203.

[19] [19] AYEB M, FRIJA M, FATHALLAH R. Prediction of residual stress profile and optimization of surface conditions induced by laser shock peening process using artificial neural networks［J］. The International Journal of Advanced Manufacturing Technology, 2019, 100(9): 2455-2471.

[21] [21] HU Y X, LI K M, QI C J, et al. Size effect on indentation depth of oxygen-free high purity copper induced by laser shock processing［J］. Transactions of Nonferrous Metals Society of China, 2012, 22: s573-s578.

[24] [24] MAN J X, YANG H F, WANG Y F, et al. Study on controllable surface morphology of the micro-pattern fabricated on metallic foil by laser shock imprinting［J］. Optics & Laser Technology, 2019, 119: 105669.

[25] [25] ADU-GYAMFI S, REN X D, LARSON E A, et al. The effects of laser shock peening scanning patterns on residual stress distribution and fatigue life of AA2024 aluminium alloy［J］. Optics & Laser Technology, 2018, 108: 177-185.

[28] [28] DAI F Z, LU J Z, ZHANG Y K, et al. Effect of laser spot size on the residual stress field of pure Al treated by laser shock processing: Simulations［J］. Applied Surface Science, 2014, 316: 477-483.

[29] [29] GUO Y B, CASLARU R. Fabrication and characterization of micro dent arrays produced by laser shock peening on titanium Ti-6Al-4V surfaces［J］. Journal of Materials Processing Technology, 2011, 211(4): 729-736.

[30] [30] DE BONIS A, SANSONE M, D′ALESSIO L, et al. Dynamics of laser-induced bubble and nanoparticles generation during ultra-short laser ablation of Pd in liquid［J］. Journal of Physics D: Applied Physics, 2013, 46(44): 445301.