Fig. 1. Experimental material and femtosecond laser processing system. (a) CNTs film; (b)(c) femtosecond laser processing system

Fig. 2. Morphologies of CNTs film ablated by femtosecond laser with different wavelengths and fitting results between square of ablation aperture and logarithm of laser pulse energy. (a) λ=1030 nm, morphology after ablation; (b) λ=515 nm, morphology after ablation; (c) λ=1030 nm, fitting result; (d) λ=515 nm, fitting result

Fig. 3. Principles of femtosecond laser processing technology and microscopic morphology of CNTs film ablation (arrowrepresents laser polarization direction). (a) Principle of laser processing; (b) microscopic morphology

Fig. 4. Ablation morphologies of CNTs film at different laser pulse energies.(a) E=45 nJ; (b) E=70 nJ; (c) E=135 nJ; (d) E=165 nJ

Fig. 5. When E=25 nJ, ablation morphologies of CNTs film with different pulse numbers. (a) N=3; (b) N=20; (c) N=50; (d) N=100

Fig. 6. Relationship between pulse number and ablation aperture at different laser pulse energies

Fig. 7. Ablation morphologies of CNTs film at different pulse energies and wavelengths. (a) E=70 nJ, N=50, λ=1030 nm; (b) E=70 nJ, N=50, λ=515 nm; (c) E=135 nJ, N=10, λ=1030 nm; (d) E=135 nJ, N=10, λ=515 nm

Fig. 8. Raman spectra of CNTs films. (a) Raman spectra of unprocessed area and area processed with 100 nJ laser; (b) Raman spectra processed with 100 nJ and 500 nJ laser when λ=515 nm

Fig. 9. SEM morphologies of CNTs film cut by femtosecond lasers with different pulse energies. (a) E=45 nJ; (b) E=100 nJ; (c) E=200 nJ; (d) E=500 nJ

Fig. 10. SEM morphologies of CNTs film cut by femtosecond lasers with different scanning speeds. (a) v=0.1 mm·s-1; (b) v=0.5 mm·s-1; (c) v=1.0 mm·s-1

Fig. 11. Microstructure of CNTs film processedby femtosecond laser