[5] [5] AICH U, BANERJEE S, BANDYOPADHYAY A, et al. Abrasive water jet cutting of borosilicate glass［J］. Procedia Materials Science, 2014, 6: 775-785.

[6] [6] FENG J Y, WAN Z P, WANG W, et al. Scratch with double-tip tool: Crack behavior during simultaneous double scratch on BK7 glass［J］. Journal of the European Ceramic Society, 2020, 40(12): 4202-4216.

[7] [7] SAVRIAMA G, MENDEZ J, BARREAU L, et al. Crack-free laser dicing of glass in the microelectronics industry［J］. Journal of Laser Applications, 2013, 25(5): 052010.

[8] [8] NISAR S, LI L, SHEIKH M A. Laser glass cutting techniquesa -A review［J］. Journal of Laser Applications, 2013, 25(4): 042010.

[11] [11] SHIN H, NOH J, KIM D. Bottom-up cutting method to maximize edge strength in femtosecond laser ablation cutting of ultra-thin glass［J］. Optics & Laser Technology, 2021, 138: 106921.

[12] [12] CAI Y C, WANG M L, ZHANG H Z, et al. Laser cutting sandwich structure glass-silicon-glass wafer with laser induced thermal-crack propagation［J］. Optics & Laser Technology, 2017, 93: 49-59.

[13] [13] FEUER A, THOMAS J U, FREITAG C, et al. Single-pass laser separation of 8mm thick glass with a millijoule picosecond pulsed Gaussian-Bessel beam［J］. Applied Physics A, 2019, 125(5): 332.

[14] [14] LIU H G, LIN W X, HONG M H. Hybrid laser precision engineering of transparent hard materials: Challenges, solutions and applications［J］. Light, Science & Applications, 2021, 10(1): 162.

[15] [15] XIE X Z, ZHOU C X, WEI X, et al. Laser machining of transparent brittle materials: From machining strategies to applications［J］. Opto-Electronic Advances, 2019, 2(1): 18001701-18001713.

[16] [16] ZHAO C Y, ZHANG H Z, WANG Y. Semiconductor laser asymmetry cutting glass with laser induced thermal-crack propagation［J］. Optics and Lasers in Engineering, 2014, 63: 43-52.

[17] [17] WATANABE W, LI Y, ITOH K.Ultrafast laser micro-processing of transparent material［J］. Optics & Laser Technology, 2016, 78: 52-61.

[18] [18] SHIN H, KIM D. Strength of ultra-thin glass cut by internal scribing using a femtosecond Bessel beam［J］. Optics Laser Technology, 2020, 129: 106307.

[19] [19] LIAO K, WANG W J, MEI X S, et al. High quality full ablation cutting and stealth dicing of silica glass using picosecond laser Bessel beam with burst mode［J］. Ceramics International, 2022, 48(7): 9805-9816.

[20] [20] FLAMM D, KAISER M, FEIL M, et al. Protecting the edge: Ultrafast laser modified C-shaped glass edges［J］. Journal of Laser Applications, 2022, 34(1): 012014.

[21] [21] COUAIRON A, MYSYROWICZ A. Femtosecond filamentation in transparent media［J］. Physics Reports, 2007, 441(2/3/4): 47-189.

[22] [22] UNGARO C, LIU A P. Single-pass cutting of glass with a curved edge using ultrafast curving Bessel beams and oblong airy beams［J］. Optics & Laser Technology, 2021, 144: 107398.

[23] [23] ROTH G L, ESEN C, HELLMANN R. Circular microchannels inside bulk polymethylmethacrylate generated by femtosecond laser using slit beam shaping［J］. Journal of Laser Applications, 2019, 31(2): 1-5.

[24] [24] LIU Z M, XU J, LIN Z J, et al. Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication［J］. Optics Laser Technology, 2021, 141: 107118.

[25] [25] CHENG Y, SUGIOKA K, MIDORIKAWA K, et al. Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser［J］. Optics Letters, 2003, 28(1): 55-57.

[26] [26] SCHAFFER C B, GARCA J F, MAZUR E. Bulk heating of transparent materials using a high-repetition-rate femtosecond laser［J］. Applied Physics A, 2003, 76(3): 351-354.

[27] [27] SAKAKURA M, SHIMIZU M, SHIMOTSUMA Y, et al. Temperature distribution and modification mechanism inside glass with heat accumulation during 250kHz irradiation of femtosecond laser pulses［J］. Applied Physics Letters, 2008, 93(23): 1-3.

[28] [28] AMINA, JI L F, YAN T Y, et al. Ionization behavior and dynamics of picosecond laser filamentation in sapphire［J］. Opto-Electronic Advances, 2019, 2(6): 19000301-19000307.

[29] [29] HU S, XIA X S, GAI B D, et al. Laser-induced multiphoton and collisional ionizations in sodium-argon mixture［J］. Journal of Luminescence, 2020, 225: 117370.

[30] [30] SUN M Y, EPPELT U, HARTMANN C, et al. Damage morphology and mechanism in ablation cutting of thin glass sheets with picosecond pulsed lasers［J］. Optics & Laser Technology, 2016, 80: 227-236.