Chinese Journal of Lasers, Volume. 34, Issue s1, 227(2007)

Improving of the Equipment of Laser Assisted Microprocessing Used in OEICs

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    References(15)

    [1] [1] Ye Yutang. Laser Assisted Microprocessing [M]. Chengdu: Press of University of Electronic Science and Technology, 1995

    [4] [4] A. Yu Bonchik, S. G. Kijak, Z. Gotra et al.. Laser technology for submicron-doped layers formation in semiconductors [J]. Optics & Laser Technology, 2001, 33(8): 589~591

    [5] [5] T. K. Ong, Y. C. Chan, B. S. Ooi. Fabrication of multiple-wave-length lasers in InGaAs-InGaAsP structures using direct laser writing [J]. IEEE Photon. Technol. Lett., 2001, 13(11): 1161~1163

    [6] [6] Li Zhongdong, Ye Yutang, Hong Yonghe et al.. Remote sensing of the temperature of the exposed region in laser assisted diffusion [J]. J. Appl. Sci., 1997, 15(4): 413~417

    [7] [7] Zhao Aiying, Ye Yutang, Wu Yunfeng et al.. Temperature measurement precision for small laser-processed region [J]. J. Semiconductor Optoelectronics, 2005, 26(6): 531~534

    [10] [10] Wu Yunfeng, Ye Yutang, Wu Zeming et al.. Temperature rise of InP heated by CW CO2 laser locally [J]. Chinese J. Semiconductors, 2004, 25(8): 956~960

    [13] [13] Liu Lin, Zhao Suying, Liu Juanxiu et al.. Laser etching holes diameter controlling and transverse etching [J]. J. Optoelectronics·Laser, 2005, 16(7): 841~844

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Improving of the Equipment of Laser Assisted Microprocessing Used in OEICs[J]. Chinese Journal of Lasers, 2007, 34(s1): 227

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    Paper Information

    Category: laser manufacturing

    Received: --

    Accepted: --

    Published Online: May. 25, 2009

    The Author Email: (fanchao41@126.com)

    DOI:

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