Chinese Optics Letters, Volume. 6, Issue 5, 384(2008)

Intrinsic stress analysis of sputtered carbon film

Liqin Liu, Zhanshan Wang*, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, and Lingyan Chen
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  • Institute of Precision Optical Engineering, Tongji University, Shanghai 200092
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    Liqin Liu, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, Lingyan Chen, "Intrinsic stress analysis of sputtered carbon film," Chin. Opt. Lett. 6, 384 (2008)

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    Paper Information

    Received: Sep. 11, 2007

    Accepted: --

    Published Online: May. 20, 2008

    The Author Email: Zhanshan Wang (wangzs@mail.tongji.edu.cn)

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