Chinese Optics Letters, Volume. 6, Issue 5, 384(2008)
Intrinsic stress analysis of sputtered carbon film
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Liqin Liu, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, Lingyan Chen, "Intrinsic stress analysis of sputtered carbon film," Chin. Opt. Lett. 6, 384 (2008)