Acta Photonica Sinica, Volume. 52, Issue 7, 0752307(2023)

High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser

Yang LIU1,2,3, Xiangping ZHU1,2,3, Chuan JIN1,2,3, Xiaomo ZHANG1,2,3, and Wei ZHAO1,2,3、*
Author Affiliations
  • 1Xi'an Institute of Optics and Precision Machinics,Chinese Academy of Sciences,Xi'an 710119,China
  • 2State Key Laboratory of Transient Optics and Photonics Technology,Xi'an 710119,China
  • 3University of Chinese Academy of Sciences,Beijing 100049,China
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    Yang LIU, Xiangping ZHU, Chuan JIN, Xiaomo ZHANG, Wei ZHAO. High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser[J]. Acta Photonica Sinica, 2023, 52(7): 0752307

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    Paper Information

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    Received: Apr. 6, 2023

    Accepted: Jun. 21, 2023

    Published Online: Sep. 26, 2023

    The Author Email: Wei ZHAO (weiz@opt.ac.cn)

    DOI:10.3788/gzxb20235207.0752307

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