Chinese Optics, Volume. 17, Issue 6, 1408(2024)
Polarization aberration analysis of catadioptric anamorphic optical systems and its effect on the point spread function
[1] [1] CHIPMAN R, LAM W S T, YOUNG G. Polarized Light Optical Systems[M]. Boca Raton: CRC Press, 2018.
[2] CHIPMAN R A, LAM W S T, BRECKINRIDGE J. Polarization aberration in astronomical telescopes[J]. Proceedings of SPIE, 9613, 96130H(2015).
[8] [8] CHIPMAN R A. Polarization aberrations[D]. Tucson: The University of Arizona, 1987.
[16] [16] BERNING P H. They Calculation of Optical Thin Films[M]HASS G. Physics of Thin Films. New Yk: Academic Press, 1963.
[17] GEH B, RUOFF J, ZIMMERMANN J et al. The impact of projection lens polarization properties on lithographic process at hyper-NA[J]. Proceedings of SPIE, 6520, 65200F(2007).
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Shi-jie MA, Hong-bo WU, Shang-nan ZHAO, Qing WU, Xin ZHANG. Polarization aberration analysis of catadioptric anamorphic optical systems and its effect on the point spread function[J]. Chinese Optics, 2024, 17(6): 1408
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Received: Jan. 10, 2024
Accepted: Feb. 28, 2024
Published Online: Jan. 14, 2025
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