Chinese Optics, Volume. 16, Issue 5, 973(2023)

Recent advances in metasurfaces for polarization imaging

Jun-zhuo ZHOU1,2,3, Jia HAO1,2,3, Xiao-chang YU1,2,3, Jian ZHOU4, Chen-wei DENG5, and Yi-ting YU1,2,3、*
Author Affiliations
  • 1Ningbo Institute of Northwestern Polytechnical University, Ningbo 315103, China
  • 2School of Mechatronic Engineering, Northwestern Polytechnical University, Xi’an 710072, China
  • 3Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Key Laboratory of Micro and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi’an 710072, China
  • 4Xi’an Modern Control Technology Research Institute, Xi’an 710065, China
  • 5School of Information and Electronics, Beijing Institute of Technology, Beijing 100081, China
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    Figures & Tables(7)
    Metasurfaces based on plasmonic and all dielectric structures. (a) Metagrating based on a GSP structure for the determination of full Stokes parameters[84]; (b) the metagrating consists three kinds of micro-nano structure arrays with different phase gradients, which can manipulate orthogonal polarization states (x, y), (a, b), (l, r)[84]; (c) circular polarization splitting GSP-based metagrating[85]; (d) polarization splitting and focusing metasurface GSP-based metalens[86]; (e) meta-atom includes two kinds of TiO2 nano-micro structures manipulating left-handed and right-handed circular polarization light, respectively; (f) polarization image of the exoskeleton of a chiral beetle[92]; (g) meta-pixel is composed of metalenses focusing x,y,a,b,l,r polarization states, respectively[93]; (h) the metasurface can be served as Hartmann-Shack wavefront sensor, intensity distribution of radially polarized beam (left), and calculated polarization profile (right)[93]
    All dielectric metasurface based on geometric phase and propagation phase theory. (a) The metasurface is composed of elliptical amorphous silicon posts[101]; (b) polarization splitting metagrating, polarization splitting metalens, polarization-dependent holographic metasurface and polarization-dependent special optical field metasurface[101]; (c) polarization splitting metalens array[102]; (d) targeted polarization mask (left), the fabricated mask imaged using conventional polarimetry (middle), the same mask imaged using the metasurface (right)[102]; (e) polarization splitting metalens[103]; (f) planar metasurface consisting of three polarization splitting metalenses[104]; (g) the comparison of measured and simulated results of the metasurface focusing effect with the incidence of six basic polarization states[104]
    Theory, imaging and system of a polarimetric metagrating based on matrix Fourier optics. (a) Theoretical model of a polarimetric metagrating[105]; (b) combination with a rear lens and a detector can achieve polarization imaging[105]; (c) four kinds of unconventional polarization states[105]; (d) full Stokes polarization imaging system integrated with the metagrating[105]; (e) polarimetric measurement image[105]; (f) angle of polarization image[105]; (g) full Stokes polarimetric module[106]
    Broadband achromatic polarization splitting metasurfaces. (a) Coupled rectangular dielectric resonators[110]; (b) the focusing phase can be divided into the basic phase and the chromatic phase[111]; (c) there are several resonant peaks in the specially designed micro-nano metallic structure element[111]; (d) measured and simulated focal lengths as a function of wavelength for both polarizations[113]; (e) measured intensity profiles along with longitudinal directions at various incident wavelengths. The left panel is for x-polarized incidence and the right panel is for y-polarization incidence[113]; (f) near-infrared achromatic metalens array for multiparameter detection[115]; (g) measured intensity profiles under incidence of XLP and LCP light[115]
    Metasurface design based on machine learning. (a) Visible chromatic multilevel diffractive lens[119]; (b) flow chart of the direct binary search algorithm[119]; (c) inverse design network[124]; (d) polarization splitting metalens[124]; (e) end-to-end statistical machine learning framework[126]; (f) simulated and measured results of four-frequency polarization splitting metalenses[126]
    Metalens with dynamically tunable focal length. (a) Dynamically tunable metasurface based on a flexible substrate[136]; (b) a group of metasurfaces with adjustable longitudinal spacing, schematic diagram (left), optical microscopy image of device (top right), illustration of the bonding of two metasurfaces (bottom right)[138]; (c) dynamically tuning the focal length through liquid crystal infiltration[141]; (d) near-infrared thermally modulated varifocal metalens based on a low-losses phase change material Sb2S3[143]; (e) polarization splitting metalens with a dynamically tunable focal length by circumferential stretching; (f) the variation curves of focal length and transmission with unit period; (g) the variation curves of the electric field intensity with the longitudinal direction at different unit periods
    • Table 1. Features comparison of elaborated metasurfaces in this section

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      Table 1. Features comparison of elaborated metasurfaces in this section

      Work byOperation Bandwidth Energy Efficiency Working Mode Materials Involved Fabrication Method Functional Type
      Pors et al.(2015)[84] 700-1000 nm≈50%reflectionAu,SiO2EBL + lift- off + EBD PSMG
      Shaltout et al. (2015)[85] 1.2-1.7 μm<40%reflectionAu,Al2O3EBL + lift- off +EBD PSMG
      Boroviks et al. (2017)[86] 750-950 nm≈65%reflectionAu,SiO2EBL + lift- off + EBD PSML
      Khorasaninejad et al. (2016)[92] visible<45%transmissionTiO2,SiO2EBL + lift- off + ALD PSML
      Yang et al. (2018)[93] 1550 nm≈28%transmissionSi,SiO2EBL + ICP etchingPFMLA
      Arbabi et al. (2018)[101] 850 nm60%-65%transmissionα-Si,SiO2EBL + lift- off + RIE PSMLA
      Yan et al.(2019)[103] 10.6 μm≈53%transmissionSiLDW + ICP etchingPSML
      Rubin et al. (2019)[105] visible>50%transmissionTiO2,SiO2EBL + lift- off + ALD PSMG
      Ren et al.(2022)[104] 530 nm≈54%transmissionTiO2,SiO2EBL + lift- off + ALD PSML
      Abbreviations: Electron Beam Lithography, EBL; Electron Beam Deposition, EBD; Atomic Layer Deposition, ALD; Inductively Coupling Plasma, ICP; Reactive Ion etching, RIE; Laser Direct Writing, LDW; Polarization splitting metagrating, PSMG; Polarization splitting metalens, PSML; Polarization filtering metalens array, PFMLA; Polarization splitting metalens array, PSMLA.
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    Jun-zhuo ZHOU, Jia HAO, Xiao-chang YU, Jian ZHOU, Chen-wei DENG, Yi-ting YU. Recent advances in metasurfaces for polarization imaging[J]. Chinese Optics, 2023, 16(5): 973

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    Paper Information

    Category: Review

    Received: Nov. 16, 2022

    Accepted: --

    Published Online: Oct. 27, 2023

    The Author Email:

    DOI:10.37188/CO.2022-0234

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