Automatically Rotation-speed-controlled Layer Thickness of Ultrathin Multilayer Reflectors

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 28, Issue 11, 1027(2001)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

Abstract Get PDF(in Chinese)

References(4)

[1] [1] E. Spiller. Evaporated multilayer dispersion elements for soft X-rays. AIP Conf. Proc., 1981, 75:124～130

[2] [2] Ph. Hondy, V. Bodart, C. Hily et al.. Performances of C-W multilayers as soft X-ray optics: high reflectivity in the range 2d=60 to 100. SPIE, 1986, 733:389～397

[3] [3] S. V. Goponov, S. A. Gusev, B. M. Luskin et al.. Long-wave X-ray radiation mirrors. Opt. Comm., 1981, 38(1):7～9

[4] [4] T. W. Barbee, Jr.. Sputtered layered synthetic microstructure (LSM) dispersion elements. AIP Conf. Proc., 1981, 75:131～145

CLP Journals

[1] Zhu Yadan, Fang Ming, Yi Kui. Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer[J]. Acta Optica Sinica, 2011, 31(11): 1131001

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Automatically Rotation-speed-controlled Layer Thickness of Ultrathin Multilayer Reflectors[J]. Chinese Journal of Lasers, 2001, 28(11): 1027

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: spectroscopy

Received: Aug. 21, 2000

Accepted: --

Published Online: Aug. 10, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology