Infrared and Laser Engineering, Volume. 51, Issue 9, 20220602(2022)

Method of edge control on surface error in aspherical optics (invited)

Lunzhe Wu, Xueke Xu*, Lingqi Wu, and Zhe Wang
Author Affiliations
  • Centre of Precision Optics Manufacture and Metrology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    References(7)

    [1] D Walker, G Yu, H Li, et al. Edges in CNC polishing: From mirror-segments towards semiconductors, paper 1: Edges on processing the global surface. Optics Express, 20, 19787-19798(2012).

    [2] H Li, D Walker, G Yu, et al. Edge control in CNC polishing, paper 2: Simulation and validation of tool influence functions on edges. Optics Express, 21, 370-381(2013).

    [3] Changjun Jiao, Shengyi Li, Xuhui Xie, et al. Bayesian principle based dwell time algorithm for ion beam figuring of low gradient mirrors. Journal of Mechanical Engineering, 45, 253-259(2009).

    [4] Yun Li, Guping Duan, Tingwen Xing. Smoothly extending algorithm for the surface error of optics. Infrared and Laser Engineering, 42, 408-412(2013).

    [5] Yun Li, Tingwen Xing. Surface error of optical components extended with non-uniform rational B-spline surface. Acta Optica Sinica, 32, 0722001(2012).

    [6] Jianfen Wu, Zhenwu Lu, Hongxin Zhang, et al. Optimized dwell time solution for optics in ion beam figuring. Acta Optica Sinica, 30, 192-197(2010).

    [7] Caixue Tang, Hao Yan, Zijian Luo, et al. High precision edge extrapolation technique in continuous phase plate magnetorheological polishing. Infrared and Laser Engineering, 48, 0442001(2019).

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    Lunzhe Wu, Xueke Xu, Lingqi Wu, Zhe Wang. Method of edge control on surface error in aspherical optics (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220602

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Jul. 22, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email: Xu Xueke (xuxk@siom.ac.cn)

    DOI:10.3788/IRLA20220602

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