Process Study on Laser Marking of Wafer with 1 066 nm Fiber Laser

APPLIED LASER, Volume. 43, Issue 2, 88(2023)

Du Yuanchao^1,2、*, Zhang Lingling^1,2, and Yang Wenjie¹

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¹[in Chinese]

²[in Chinese]

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Du Yuanchao, Zhang Lingling, Yang Wenjie. Process Study on Laser Marking of Wafer with 1 066 nm Fiber Laser[J]. APPLIED LASER, 2023, 43(2): 88

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Received: Aug. 19, 2022

Accepted: --

Published Online: Mar. 30, 2023

The Author Email: Yuanchao Du (duyuanchao0532@163.com)

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