Journal of Infrared and Millimeter Waves, Volume. 44, Issue 3, 327(2025)
Research on the punch-through phenomenon of separate absorption, charge and multiplication avalanche photodetectors
This paper investigates the punch-through characteristics of separate absorption, charge and multiplication avalanche photodetector (SACM APD). By analyzing the device's spectral response, capacitance characteristics, and I-V characteristics at various operating temperatures, and combining these with simulated internal electric field and energy band distributions from the SILVACO platform, we analyzed examined the performance of the SACM APD before and after punch-through and established a corresponding mathematical model. Through structural and process parameter optimization for silicon-based SACM APD devices, simulations revealed that when the ion implantation energy of the field-control layer was 580 keV, the optimized device exhibited a punch-through threshold voltage of -30 V and a capacitance reduction to one-third of the pre-punch-through value. Subsequently, a silicon SACM APD device was fabricated using the complementary metal-oxide-semiconductor (CMOS) process. Measurements confirmed a punch-through threshold voltage of -30 V, a 2.18-fold increase in photocurrent at 808 nm (punch-through), a redshift of the peak responsivity wavelength from 590 nm (pre-punch-through) to 820 nm (post-punch-through), and an elevation of the peak responsivity from 0.171 A/W@590 nm to 0.377 A/W@820 nm. The capacitance was also reduced to one-third of the pre-punch-through value at 1 MHz.
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Chong LI, Zi-Yi MA, Shuai YANG, Yue-Wen LIU, Jia-Xuan WANG, Yun-Fei LIU, Yu-Sen DONG, Zi-Qian LI, Dian-Bo LIU. Research on the punch-through phenomenon of separate absorption, charge and multiplication avalanche photodetectors[J]. Journal of Infrared and Millimeter Waves, 2025, 44(3): 327
Category: Infrared Physics, Materials and Devices
Received: Sep. 10, 2024
Accepted: --
Published Online: Jul. 9, 2025
The Author Email: Chong LI (lichong@bjut.edu.cn)