Researching | Progress in heterogeneous integration technology of InGaAs-Si based photodetectors

Laser Technology, Volume. 49, Issue 4, 617(2025)

Progress in heterogeneous integration technology of InGaAs-Si based photodetectors

Wanli LI^1,2, Xin ZHOU^1,2, Fanlin KONG^1,2, Qingmin CHEN^1,2, Pigang LIANG^1,2, Yuxin SHU^1,2, Qian DAI^1,2、*, and Haizhi SONG^1,2,3

Author Affiliations

¹Key Laboratory of LiDAR and Device, Southwest Institute of Technical Physics, Chengdu 610041, China

²Key Laboratory of Laser Devices and Technology, China North Industries Group Co.Ltd., Chengdu 610041, China

³Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China)

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Wanli LI, Xin ZHOU, Fanlin KONG, Qingmin CHEN, Pigang LIANG, Yuxin SHU, Qian DAI, Haizhi SONG. Progress in heterogeneous integration technology of InGaAs-Si based photodetectors[J]. Laser Technology, 2025, 49(4): 617

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Paper Information

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Received: Jul. 22, 2024

Accepted: --

Published Online: Aug. 28, 2025

The Author Email: Qian DAI (star_626@163.com)

DOI:10.7510/jgjs.issn.1001-3806.2025.04.021

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology