Chinese Journal of Lasers, Volume. 47, Issue 9, 904003(2020)

Calibration of Laser Triangular Displacement Sensor Based on Nonlinear Fitting

Cui Hao1,2,3, Guo Rui1,2, Li Xingqiang1,2、*, and Cong Rigang1,2
Author Affiliations
  • 1Intelligent Detection and Equipment Department, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, Liaoning 110016, China
  • 2Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences,Shenyang, Liaoning 110169, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(11)
    Laser triangular displacement detection. (a) Measurement principle; (b) theoretical measurement curve
    One-dimensional PSD. (a) Profile map; (b) example of detection error
    Measurement variance in different positions of PSD
    Multivariate local approximate linear estimation
    Displacement detection model
    Displacement detection site
    Raw dataset. (a) Scatter of original data; (b) testing results of interferometer
    Results of data preprocessing
    • Table 1. Comparison of calibration results under different times

      View table

      Table 1. Comparison of calibration results under different times

      Serial numberof the sensorNumber ofsamplingk=2
      mse ε /mm2Maximum errorμ /mmPrecisionσ /%Processingtime τ /s
      2.01×10-50.01180.700.49
      No.12051.96×10-50.01190.710.32
      1.97×10-50.01180.700.32
      No.22112.37×10-50.01250.750.31
      No.32052.31×10-50.01170.710.35
      Serial numberof the sensorNumber ofsamplingk=3
      mse ε /mm2Maximum errorμ /mmPrecisionσ /%Processingtime τ /s
      2.18×10-50.01540.920.46
      No.12052.16×10-50.01550.920.35
      2.16×10-50.01540.910.36
      No.22112.46×10-50.01650.980.42
      No.32052.27×10-50.01510.930.38
      Serial numberof the sensorNumber ofsamplingk=4
      mse ε /mm2Maximum errorμ /mmPrecisionσ /%Processingtime τ /s
      2.34×10-50.0181.070.45
      No.12052.42×10-50.01811.080.48
      2.38×10-50.01791.070.54
      No.22112.3×10-50.01971.170.46
      No.32052.3×10-50.01771.080.47
      Serial numberof the sensorNumber ofsamplingk=5
      mse ε /mm2Maximum errorμ /mmPrecisionσ /%Processingtime τ /s
      3.79×10-50.02111.260.61
      No.12053.75×10-50.02111.260.58
      3.79×10-50.02111.250.63
      No.22112.55×10-50.02221.320.62
      No.32052.62×10-50.01961.200.59
    • Table 2. Comparison of calibration results of different node vector divisions

      View table

      Table 2. Comparison of calibration results of different node vector divisions

      ItemUBSQUBSNUBS
      mse ε /mm20.00342.29×10-52.37×10-5
      Maximum error μ /mm0.0830.01360.0125
      Precision σ /%2.5%0.81%0.75%
      Processing time τ /s0.790.420.35
    • Table 3. Comparison of experimental results of different data processing methods

      View table

      Table 3. Comparison of experimental results of different data processing methods

      ItemSVMBPWFIIRNUBS
      mse ε /mm21.44×10-43.26×10-55.57×10-42.59×10-42.37×10-5
      Maximum error μ /mm0.02490.01360.03550.01990.0125
      Precision σ /%1.500.812.101.200.75
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    Cui Hao, Guo Rui, Li Xingqiang, Cong Rigang. Calibration of Laser Triangular Displacement Sensor Based on Nonlinear Fitting[J]. Chinese Journal of Lasers, 2020, 47(9): 904003

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    Paper Information

    Category: Measurement and metrology

    Received: Mar. 25, 2020

    Accepted: --

    Published Online: Sep. 16, 2020

    The Author Email: Xingqiang Li (lixingqiang@sia.cn)

    DOI:10.3788/CJL202047.0904003

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