Chinese Journal of Lasers, Volume. 37, Issue 10, 2615(2010)
Experimentation of Deposition Rate Control of SiO2 by E-Beam Auto-Sweeping
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Wang Ning, Wei Chaoyang, Shao Jianda, Fan Zhengxiu, Yi Kui. Experimentation of Deposition Rate Control of SiO2 by E-Beam Auto-Sweeping[J]. Chinese Journal of Lasers, 2010, 37(10): 2615
Paper Information
Category: materials and thin films
Received: Dec. 18, 2009
Accepted: --
Published Online: Sep. 25, 2010
The Author Email: Ning Wang (shumangy@126.com)
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