Fig. 1. Schematic diagram of two-photon polymerization lithography.

Fig. 2. X-ray polymer refractive lens. (a) Geometric parameters of a single lens. (b) 3D model of an X-ray beam being focused through three refractive lenses.

Fig. 3. 3D schematic diagram of the experimental setup.

Fig. 4. Microfocus X-ray grating interferometer setup

Fig. 5. Experimental recording images. (a) Image recorded with a microfocus X-ray source. (b) Reference image and (c) inspection image of the lens by X-ray speckle tracking (XST) method recorded at the BL09B beamline of the Shanghai Synchrotron Radiation Facility.

Fig. 6. Characterization of the refractive properties of the polymer refractive lens. (a) The measured beam deflection angles of a single lens α_l,m. (b) The measured beam deflection angles of a set of three lenses α_l,thr. (c) A comparison of a line plot along the x-axis of the measured beam deflection α_l,m and its target value α_l,t. (d) The deviation of the beam deflection angle Δα_l along the x-axis between the experimental value and the target value.

Fig. 7. The wavefront phase shift of the X-ray transmitted through the lens. (a) A comparison of a line plot along the x-axis of the measured wavefront phase shift Ø_l,m and target wavefront phase shift Ø_l,t. (b) The deviation of the wavefront phase shift ΔØ_l along the x-axis between the experimental value and the target value.

Fig. 8. Reconstructed surface shape result using the DPCI method.

Fig. 9. Reconstructed lens surface shape results. (a) Experimental site at Shanghai Synchrotron Radiation Facility. (b) A comparison of the reconstructed lens surface shape results for a line plot along x-axis between the DPCI and XST methods. (c) The thickness deviation between the DPCI and XST methods.